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سیستم هاي میکروالکترومکانیکال و نانو - 405 لینک در زمینه mems & nano
 405 لینک در زمینه mems & nano
Fabrication Services

The MEMS and Nanotechnology Exchange coordinates a virtual fab, a network of fabrication centers that lets our users draft process sequences which are performed across the boundaries separating the individual facilities. Our service is made available to the United States community including commercial, academic, and government organizations.

Consulting Services

The MEMS and Nanotechnology Exchange provides general consulting as well as invention creative services to the community. General consulting includes such activities as:

  • Development of a product development strategy
  • Costing analysis for NRE as well as manufacturing
  • Optimization of device design and/or fabrication
  • Evaluation of production efficiencies
  • Selecting suitable foundries for manufacturing
  • Assisting in transfer of production to another foundry
  • Device and/or process diagnostics
  • Development or evaluation of a QC protocol
  • Reliability and failure analysis
  • Mechanical or material property measurement and characterization

Mask Making Services

The MEMS and Nanotechnology Exchange offers a range of options for mask design and fabrication. Our engineers can make the layout design for you or use your layout files. Our mask fabrication capabilities range from pattern generation, to E-beam, to X-ray.

Whatever your mask requirements are, the MEMS and Nanotechnology Exchange can help.

Software

The MEMS Exchange has developed a software system that is specially suited for MEMS and Nano technology job shops. The software system has many of the same features as the software that runs the entire MEMS Exchange operation and is well suited for managing a project or an entire facility's operations depending on the exact needs of the customer.

The system incorporates over 30 man-years of development effort and runs in a Linux environment. Our software system uses a network-based approach and therefore affords easier access, provides excellent scalability, eliminates problems with compatibility, but affords high-level security protections.

Contact us at engineering@mems-exchange.org

We specialize on design, modeling and simulation of MEMS devices. Tools used: ANSYS, CoventorWare, P-Spice, Saber, Matlab, AutoCAD, L-Edit.
Services in US patent law, featuring patent attorney with multidisciplinary background combining physics, chemistry, biotechnology, and expertise on nanotechnology and MEMS.
We provide early-stage product development and fabrication services; expert MEMS-specific modeling using ANSYS Multiphysics; technical strategy and due diligence evaluations.
ABM designs and manufactures mask aligners, exposure systems, photolithographic products and accessories used in the production of semiconductor integrated circuits.
Designs and manufactures liquid level controls, switches, sensors, transducers, and solid state controls.
"Marketing for Micro and Nano Technologies". The Adelsa Group provides cost-effective marketing and market research services to companies developing or seeking technology for miniaturization of electronic systems. The group offers a full range of capabilities, from business development and competitive intelligence, to marketing communications and technology assessment. Adelsa's experience and wide range of clients and contacts in the MEMS, sensor and microelectronics industries helps both young and established companies secure visibility and validation for emerging microtechnology. The company's broad international expertise enables it to work with clients in North America, Europe and Asia, and to obtain marketing results and market data worldwide.
ADTEK Photomask is a merchant photomask manufacturer that has been providing photomask services worldwide for over 25 years. We use the latest state-of-the-art writing tools to provide a full range of Optical, E.Beam and Laserwrite photomasks for microelectronics, semiconductor, optoelectronics, photonics, MEMS, medical and nanotechnology industries.
We have been a merchant photomask manufacturer for over 30 years. We have 2 Micronics Laser Writers and 5 Optical Pattern Generators used to generate masks on either chrome, iron oxide or emulsion. We can handle chrome on glass plates up to 32 inches square.
ACML is a research team at the University of Minnesota specializing in MEMS sensor design and fabrication. We are trying to develop new sensing principles by using control theory as an enabling technology. Our expertise lies in the area of applying advanced control algorithms on in-house fabricated MEMS devices. Some of the completed and ongoing projects include MEMS 2D electrostatic actuators that can be actuated inside the pull-in range by applying nonlinear controls, a MEMS absolute angle measurement sensor design, fabrication and implementation, wireless MEMS acoustic sensors and MEMS sensor SAW device integration for wireless sensors.
Offers design, development and volume manufacturing foundry services for 3" and 6" wafer MEMS, MOEMS and thin film devices. Specialties include CMOS-compatible processing, magnetic materials, high aspect-ratio UV-LIGA microlithography, through-mask electrodeposition, CMP, deep-silicon Bosch ICP etching, dry and wet release etching and super-critical drying. AMS features a large, modern Class 100 cleanroom with Class 10 microlithographic coating.
Advanced Process Systems represents specialized equipment for R&D through production including Meco electro-deposition of photo resist wafer coater for conformal resist coating on high topography and deep cavities, GnP CMP systems with insitu friction force monitoring system for coupons, 4-6-8 inch wafers. Laurier FC die bonders with (.5um) placement accuracy for MEMS, Meco electroless UBM wafer plater and SRI International's new R&D Fab for MEMS, optoelectronics & 3D advanced packaging.
Supplier of quartz and silicon wafers and wafer processing services.
Products and services include: SOI wafer, silicon on glass, silicon direct bonding, and bonding services.
AI Technology is the maker of Cool Grease(R) and Cool Pad(TM) used in deep reactive ion etching for MEMS and wafer processing applications in nanofabrication labs all over the world. Cool Grease(R) CGR7016 is an industry standard in MEMS fabrication. AI Technology's Cool Pad(TM) films offer alternative to Cool Grease with easier application and clean up.
Manufactures a deep plasma etching system equiped with an ICP (Inductively Coupled Plasma) reactor, capable of processing wafers up to 8" using the Bosch process and Alcatel's Cryogenic process.
An informative site sponsored by MEMSCAP.
Thin film deposition services.

Advanced MEMS for RF and MillimeterWave Communications

This Network of Excellence aims to create a European Virtual Institute for developing Smart MEMS microsystems for advanced communications. It regroups 25 partners from 14 countries.

Amkor Technology is the world's leader in micro electronic packaging technologies and the world's largest outsource provider of Micro Electronic Mechanical Systems (MEMS) and Micro Optical Electronic Mechanical Systems (MOEMS).
World leader in high performance signal processing solutions.

ACES is a first PC-based 3-D etch simulator. The program can simulate silicon etching with different front-surface orientations in different etchants.

It is developed by the Micro Actuators, Sensors and Systems Group (MASS) http://galaxy.micro.uiuc.edu

The Center of Compound Semiconductor Microelectronics
University of Illinois at Urbana-Champaign

SOI Wafers 4/5/6/8". All work done in house from ingot slicing to final polish. No out sourcing, low cost, fast delivery, perfect edges, device tolerance down to +/- 0.5um.

ANSYS software has evolved into a multi-physics analysis environment capable of simulating a broad range of physics including: structural, thermal, fluid , acoustics, electromagnetics, and electronic circuits. The ANSYS/Multiphysics product supports direct and indirect coupling between these different physics to facilitate accurate modeling of real world effects. Examples relevant to the MEMS community are fluid-structural, thermo-electric (Joule heating), electro-structural (piezoelectric) and electrostatic-structural.

The ANSYS/MEMS Website http://www.ansys.com/ansys/ provides an overview of the ANSYS MEMS Initiative, and also recent technical papers showing ANSYS in action, ANSYS Solutions articles containing some serious MEMS analysis, and a basic MEMS materials database.

ANSYS.NET http://ansys.net/ansys/ an ansys user's resource, is an extensive collection of ANSYS-related resources.

The XANSYS mailing list http://www.xansys.org/ is for discussion among ANSYS users about program bugs/ideas/modelling techniques, hardware, FEA employment, and related topics.

AWR-APLAC develops and markets simulation and analysis software for analog and RF designers. The software is specially designed to meet the challenges of mobile communications. APLAC software is used by both multi-national companies as well as small design agencies to solve their most challenging simulation problems. APLAC enhances the cost effectiveness and shortens the design time. APLAC's capabilities range from integrated circuits to circuit board and system level design, from direct current to RF and microwave frequencies.
Apogee Technology designs, develops, and markets Micro Electro Mechanical Systems (MEMS) and analog & digital circuit designs for the consumer, automotive, communications and medical markets.
Offers wafer, packaging and test/characterization foundry services for fabless MEMS product vendors. We also design and manufacture MEMS-based products including sensors, accelerometers and micro-mirrors for a variety of applications.
CMP services.
CAD Translators, Postprocessors and Plotter Drivers
The Asian Technology Information Program (ATIP) is a non-profit organization dedicated to providing objective and high-quality information about technology developments in Asia.

ASM International is the society for materials engineers and scientists, a worldwide network dedicated to advancing industry, technology, and applications of metals and materials.

The MEMS Materials Database is a comprehensive and authoritative new source for the mechanical, physical and chemical properties of materials appropriate to the range of MEMS Packaging challenges facing device designers.

"Everything is material" at ASM International. From traditional processes like heat treating to new materials-related advances in medical devices, fuel cells, nanomaterials and MEMS. ASM provides the world's most trusted reference collections on materials data.
A semiconductor and MEMS design/technology development consulting company. 603-888-7969
Aurora delivers market analysis, technology development, market development and strategic growth plans for the Microelectronics, MEMs and Identification markets. Our products include Market analysis, Product Management development, Strategic sales and marketing services, and Intellectual Property, purchase, sales, licensing and management services.
Provides equipment and support for CMP, substrate grinding or thinning, and post-process cleaning of substrates. Equipment is either new or refurbished to OEM specifications, and includes warranty and installation support.
Supplier of LinkCAD, a CAD Translation program for translation of GDS-II, DXF, Gerber, PostScript & CIF. Used for moving files from one program to another as you step through the manufacturing processes. Baytech is also a supplier of IE3D an Electromagnetic Simulation tool for analysis of MEMS circuits.
Beam Services, Inc. is a U.S. based distributor for the following manufacturers of semiconductor equipment: ProTec AG - thin wafer handling and processing solutions; HSEB - Carl Ziess optical wafer inspection systems; Plasmatics - small footprint RIE and PECVD systems; Chemitronic - wet chemistry etch and clean stations, furnace tube cleaners, and scrubbers.
From memsnet.org.
Get microsystems from the laboratory to the market. A pilot production facility specializing in the assembly and packaging of integrated microsystems
Portal for licensable technologies, networking of innovations worldwide. Free listing of your licensable technologies for commercialisation.

Used & Refurbished Semiconductor and Mems Manufacturing Equipment. Our Specialty is Metrology & Deposition systems. Complete Facility Acquisitions and Sales.

We also provide High-Tech Equipment Appraisals, from single items to complete facilites for asset based loans.

Bosch Sensortec GmbH offers micro mechanic sensors (MEMS) and their application for consumer electronics, medical technology, security systems, logistics and Life Sciences, as well as specific foundry services. The company, founded early in 2005, is one hundred percent a subsidiary of Robert Bosch GmbH, the MEMS pioneer and the largest manufacturer of automotive sensors worldwide.
A series of monthly seminars held at MIT.
As an innovative designer and premier manufacturer of MEMS wavefront control devices, Boston Micromachines offers a full line of micromachined deformable mirrors (DMs) and reflective spatial light modulators (SLMs) that are reliable, compact, and economical. Our high performance devices are currently integral components in AO systems around the world. In addition to our standard line, we also offer custom design-manufacturing services.

Materials for Electron Beam Lithography, LIGA, NIL (Nano-Imprint Lithography) and photosensitive polyimide applications.

Performance layers offered provide release/lift-off capability, planarization, optical properties or additional physical characteristics.

Protective coatings offered include contact products, chemical products and electrical passivation products.

Brewer Science is a manufacturer of chemicals and equipment for the microelectronics and optoelectronics industries. Equipment products include spincoat/develop/baking equipment.
Includes the Multidisciplinary Microsystem Design and Integration Group http://research.et.byu.edu/mmidi/

Stephen C. Minne, Scott R. Manalis, Calvin F. Quate/Hardcover/Published 1999. Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented.

The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process.

BTL Fellows is a company that does applied Research and Development based on an extensive intellectual property base, including: MEMS Plasma Displays ; Metal-Silicide Contacts and Schottky Diodes; Ti-Pt-Au metallization; Plasma Etching; Schottky Source and Drain MOSFETs; Air Bridges and high-reliability MMIC devices. Cooperative development with Profs. Fiory and Ravindra allows access to the large-scale resources of NJIT.
Bullen Ultrasonics is the technology leader in ultrasonic machining. We have developed and perfected machining methods to match the demands of applications requiring ultrasonic processing. With our considerable experience in precision machining, coupled with our state-of-the-art facilities, we can handle your specific requirements.
Sam Burd is a consultant with extensive experience bringing products, concepts, and services from conception into reality. Consulting services include developing products, managing projects, brainstorming business strategies, assisting entrepreneurs, manufacturing instruments, and starting-up businesses.
Cadence Design Systems is the world's leading EDA technologies and engineering services company. Cadence helps its customers break through their challenges by providing leading edge electronic design solutions that speed advanced IC and system designs to volume production. Customers use Cadence software and hardware, methodologies, and services to design and verify advanced semiconductors, printed circuit boards and systems used in consumer electronics, networking and telecommunications equipment, and computer systems.
CAE Online has over 17,000 used and refurbished pieces of manufacturing and test equipment for sale. We've been serving the surplus semiconductor and nanotechnology industries including MEMS, Optoelectronics, and Photonics since our founding in 1983. We also BUY and SELL lab and scientific equipment, electronic test and measurement equipment and PC Board manufacturing and test equipment.
The Micromachining Laboratory's research interests include MEMS technology, microsensors, microactuators, microstructure, MEMS systems, and MEMS science. Successfully developed MEMS devices in Dr. Tai's lab include pressure sensors, shear-stress sensors, hot-wire anemometers, magnetic actuators, microphones, microvalves, micromotors, and so on. System-level MEMS research projects include integrated M3 (microelectronics + microsensors + microactuators) drag-reduction smart surface, flexible smart skin for the control unmanned aerial vehicles, and micro fluid delivery systems. Dr. Tai is also interested in MEMS sciences such as MEMS material (mechanical and thermal) properties, micro fluid mechanics, and micro/nano processing issues.
Manufacturing Atomic Layer Deposition (ALD) systems for Research and Development in nanotechnology; semiconductors, displays, MEMS, photonics, lasers, fuel cells, biomedical, and oled.
CMC is a not-for-profit organization established in 1984 to provide industrial microelectronic technologies to Canadian universities, both to facilitate world-class research and to ensure a strong source of well-trained graduates. CMC is supported by contributions of technology, services and cash from industry and by matching funding from the federal Natural Sciences and Engineering Research Council. CMC's membership now includes 36 universities and 20 industrial organizations. One service we provide is a MEMS service called BEAMS, which includes bulk and surface micromachining processes.
CapiliX is a supplier of microfluidic products and solutions based on glass chip technology. We address the microfluidics needs of researchers in the sectors of bio, pharma and water quality management. We provide modular solutions focusing on increasing the efficiency and decreasing reagent waste.
Dealers in refurbished semiconductor manufacturing equipment. Their web site is updated daily and represents their current inventory.
Cavendish Kinetics focuses on the development of CMOS compatible MEMS process modules, the design and modeling of MEMS devices and subsequently providing these two combined (process module and design module) as an IP (Intellectual Property) package for customers to use in numerous different application areas. As the IP package is CMOS compatible all standard CMOS foundries can be used.
Provides advanced software tools for modeling, simulation, and design of MEMS. Their software has been used for the analysis of a wide variety of physical phenomena such as fluid flow, heat transfer, combustion, and fluid-structure interaction. Industrial applications include MEMS, electronics packaging, semiconductor turbomachinery, and automotive engineering.
ChemAcoustic Technologies, Passive Aerosol Dryer's are available in Stand-Alone or as a OEM kit for wet bench integration. Specific design for MEMS and other high aspect ratio devices and Particle Neutral performance @ 120nm using a motionless process and just 2-4 mls of Isopropyl Alcohol per cycle. Also available is the Mega-Pix single substrate dry in dry out cleaning tool.
Distributor for MicroChem Corp (photoresists).
CIH Equipment specializes in environmental test equipment repair and calibration, flow calibration, noise control, and sound level meter calibration.
Clarycon.com is an information website for plasma etch and integration engineers in the VLSI and MEMS industry. It features extensive plasma etch tutorials ranging from plasma etch fundamentals to advanced applications as well news archive, event calendar, white papers, literature and patent reviews and related links.
Supplies high quality preowned equipment to the semiconductor and nanotechnology industries including MEMS, Optoelectronics, and Photonics. We focus on wafer fabrication, metrology, and assembly equipment. Our website is updated weekly with equipment available for sale. All equipment we offer for sale is in full operational condition and is available for full inspection. Installation and training is also offered.
CMP is a broker in ICs and MEMS for prototyping and low volume production. Circuits are fabricated for Universities, Research Laboratories and Industrial Compagnies.
Patent abstracts are provided online by CNIDR http://www.cnidr.org/ the Center for Networked Information Discovery and Retrieval, a service of MCNC http://www.mcnc.org
Offers medium-volume (100k/annum) production of custom and standard components to diverse high value-added custom market applications including: Navigation and Guidance, Telecommunications, Life Sciences, Industrial Applications, and Foundry Services. Products range from magnetic print heads, optical microlenses, circuits and components for telecoms, to micro-optical illumination systems, mechanical capacitative accelerometers and ionizing radiation detectors.
COMSOL MEMS Module addresses design issues that arise in the micro-world. It models physical phenomena in actuators and sensors plus microfluidic and small piezoelectric devices. Because MEMS Module is built over COMSOL Multiphysics platform it can handle electromagnetic- structural, thermal-structural, fluid-structure (FSI), electromagnetic-fluid interactions or any other combination of multiphysical couplings needed in the MEMS world.
Offers customized solutions for your OEM products in the field of MEMS technologies and Integrated Optics. C2V offers OEM Seamless Microsystems Engineering (SME), from concept design to volume production. Development, prototyping and pilot production are in-house activities. Beginning with a concept, via development and prototyping, SME also includes transfer from low to high volume production of microsystems.
Manufactures end-effectors, wafer chucks and other wafer handling equipment specifically suited for handling MEMS wafers. Our unique patented technologies, originally developed for NASA, enable us to handle perforated, warped, thin and even broken wafers with a higher level of safety and significantly less backside contamination than any other supplier today. We can also provide Zero-Contact wafer handling for even lower backside contamination levels.
Process company that designs and manufactures plasma etching and deposition equipment for semiconductor compounds, optoelectronics and MEMS technologies.
Karl Bohringer, et al.
Corning is a world leader in delivering advanced optical solutions for a broad array of commercial and industrial markets. As such, Corning’s understanding of fundamental glass science is unparalleled in the industry. With unmatched technical capability, Corning delivers more than 150 material formulations; including glass, glass ceramics and fluoride crystals. Corning increases the value it delivers to customers by optimizing the end product, eliminating the complexity of managing multiple suppliers, and shipping within a shorter cycle time more consistently than any other manufacturer.
Provides MEMS modeling, device design, process development, volume manufacturing and final assembly. Our expertise includes Silicon Micromachining, Software Tools for MEMS and Integrated Optics.
Formerly Microcosm, Coventor provides fully integrated Computer Aided Design and Analysis tools for MEMS design, system simulation, manufacturing analysis, and packaging. Offers including software, engineering, consulting and manufacturing, as well as an intellectual property portfolio.
Technical Documentation for Semiconductor and Thin Film Manufacturing Equipment.
Cronos manufactures MEMS components, primarily for communications applications, using foundry services and proprietary MEMS devices.
CSEM SA, the Swiss Center for Electronics and Microtechnology, is a privately held, knowledge-based company carrying out:
  • Applied research work
  • Product development
  • Prototype and low-volume production.
CSEM is mainly active in the fields of micro/nanotechnology, microelectronics, systems engineering, information and communication technologies.
Dedalus Consulting Inc (DCI) is an independent consultancy and publisher of high technology market research. Established in 1995, DCI is dedicated to providing clients with relevant data along with sound qualitative and quantitative analyses.
Delfmems offers MEMS reliability testing, quality control, and failure analysis. We are the solution for your product optimizations. Delfmems also performs reverse-engineering for technology watching.
Dimes is the Dutch national center for research and education on silicon-based micro-electronics.
Can develop MEMS products for other companies and act as a high-volume foundry for those products.
Design Workshop Technologies creates high-quality computer aided design software for the microelectronics, MEMS and photonics industries, as well as for other microfabrication applications. With over 15 years of software innovation, our products are flexible and cost-effective; we aim to bring maximum capability and maximum value.
World wide leader of dicing, grinding, and polishing equipment and consumables for materials such as silicon, glass, ceramic and composite materials.
Discovery Chip aims to provide a low cost microfluidics consultancy service combined with prototyping facilities and a rapid route to commercialisation. We hold extensive knowledge and experience of microfluidic technologies enabling us to provide rapid development of ideas from the concept stage to volume production. This makes it feasible for small companies, institutions or individuals who do not have the experience of microfluidics or the necessary facilities to develop their ideas and apply the benefits of microfluidics to them.
Our current mission is to supply our worldwide customers with fault-free, high-yield and reliable sets of CMOS Virtual Components, together with engineering assistance and product evolution customized to their needs.
Dynavest is the leading supplier of quality equipment, metrology/inspection tools and electronics material for the semiconductor packaging, MEMS and Optoelectronics industry in Singapore, China, Malaysia, Thailand and Philippines.
Supplies previously owned semiconductor equipment.
Manufactures benchtop, 2.5' x 2.5' x 2.5', 2 Gal, electroplaters specifically designed for MEMS and high density interconnects.
Manufacturing of MEMS designs in plastic using high-fidelity soft embossing
Stocking distributor of Silicon Wafers, III-V materials and other Crystal Substrates for use in Electronics.
Supplies Ultra High Purity (UHP) Fluorocarbons Gases to the Semiconductor and related industries. Primary products are Halocarbon 14 (Tetrafluoromethane), Halocarbon 218 (Octafluoropropane) , Halocarbon C318 (Octafluorocyclobutane), Halocarbon 23 (Trifluoromethane) and Sulfur Hexafluoride (SF6). Other high purity fluorocarbon gases and mixtures are also available.
Information about integrated microoptical devices (integrated silicon adaptive mirror and deformable mirror display), developed in the Electronic Instrumentation Laboratory of the Dept. of EE, Delft University.
Electronics.ca Publications is the portal to essential market and technology information for the global Electronics Industry. It provides succinct, up-to-date and well researched data delivering critical information on the semiconductor, electronics manufacturing, wireless technology and converging markets.
Engineering Development & Management of High Technology Products for Instrumentation, Diagnostics and Automated Devices
ELume processes silicon,glass,ceramic,lithium niobate and flexible substrates. We operate a class 10 foundry in the USA for 50-200 mm wafers. Products include multi electrode arrays MEA. We service the life,bio,neuro,pharmaceutical and drug discovery markets.
A site containing material data, formula references, and other stuff.
Engineering Objects, Inc. is an engineering consulting company specializing in MEMS and Nanotechnology systems. Based in the heart of Silicon Valley, we offer products and services in the fields of MEMS, Optics, and Nanotechnology devices. We develop software tools for MEMS design, system simulation, and packaging.
EnviroEtch (TM) provides a method of continuously etching the top surface of flat substrates, quickly and efficiently. Designed for post-diffusion etching of oxide from the surface of solar cells, this revolutionary system accepts belt-to-belt transfer of wafers eliminating the need for operator involvement or transfer to carriers. Vapor-phase etching significantly minimizes acid usage, and contamination from suspended particulates. This system provides effective, inexpensive, and rapid removal of oxide from silicon substrates.
Manufactures systems for curvilinear die cutting, memory repair, laser drilling, and package inspection.
The European Information Clearinghouse on Microsystem Technology.
A network of companies and institutes funded by the European Community, and offering expertise, design, development and production of MEMS and microsystems.
Designs and manufactures processing equipment including mask aligners, wafer bonders and debonders, spin coaters, photoresist coaters, inspection systems and wafer cleaners for the semiconductor and MEMS industries. Process assistance available.
Exponent is an engineering and scientific consulting firm which provides services in the Micro-Nano Technology (MNT) and Semiconductor areas, including MNT Test & Reliability, Material Properties Measurement & Characterization, Failure Analysis and Fab Inspection; MNT Product Development (Concept to Volume Production); Health and Environmental Risk Assessment, and Business consulting support (including IP Due Diligence, Technology Assessment and Regulatory Assistance)
Global Test Supply is a distributor of new and refurbished test equipment.
Electronic measurement systems for MEMS research.
FEI Company provides market-leading FIB, SEM, DualBeam, TEM, and SNP tools. FEI's technologies open the nanoscale for exploration, discovery and development, enabling researchers and manufacturers to think so big while working so small.
Makers of film thickness measurement equipment for measuring silicon and other MEMS process films. All equipment is based on non-contact spectral reflectance. Silicon layers as thick as 160 microns can be measured.
Precise Bonding systems, down to 0.5 micron accuracy, for technologies including MEMs, MCMs, nanoscale devices, opto-electronic, and flip chip. Thermocompression, thermosonic, eutectic, epoxy, ACF & Indium bonding.
Flow Science offers FLOW-3D, a leader free surface modeling accuracy, especially in cases where surface tension is dominant, as with microscale flows. With its fully-featured solver, FLOW-3D can be used to simulate a wide range of MEMS problems.

Manufactures vacuum wands, manual wands (wafer tweezers), vacuum pumps, tubing, and other wafer handling tools. ESD safe products and tweezers for 300mm wafer handling are also available.

Their Advanced Vacuum Technology http://www.vacuumwand.com/ division also manufactures die handling tools.

A new book, written by Dr. Chang Liu, entitled "Foundation of MEMS" has been published. Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology – all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking. ISBN: 0-13-147286-0
The Fraunhofer-Institut für Siliziumtechnologie (ISIT), Itzehoe, works on design, development and production of microelectronic components as well as on microsensors, microactuators and other components for microsystems technology. All devices of this kind can be delivered either being prototypes or customer specific series.
By Mark Madou. With nanotechnology and microengineering being among the top priority research areas for the United States over the next decade, Fundamentals of Microfabrication is an important and timely work. It is the first book to examine all aspects of the attempt to build functional devices at a molecular size.
GattaCo develops cost-effective and easy-to-use disposable diagnostic test kits for environmental, medical and industrial applications. MEMs and nano-based sensors and technologies can be easily integrated into the GattaCo diagnostics platform allowing for the rapid development and commercialization of new products.
Provides wafer backgrinding, wafer backside polishing, wafer stress relief etch, wafer dicing, die inspection, die tape and reel and die waffle packing services. Sells wafer grinding and wafer dicing tapes as well.
Sensor elements etched into silicon measure angles of vehicles, cranes or railway cars. Circuits with thousands of logic functions integrated into a single chip control machine tools or complete production processes. Household washing machines are controlled by microcontrollers. Microsystems and microelectronics today form part of virtually all sectors of industry and everyday life, and have become an integral part of the products of most manufacturers. However, many companies are faced with numerous technical, manpower and hence financial obstacles between the concept and the finished product.
Gersteltec is manufacturing and commercialising SU-8 photoresist and new SU-8 nanocomposite photoresists with specific properties (low stress, electrical conductivity) for microfabrication applications. Developement, consulting and fundry services are also offered.
GTS is a supplier of wafer dicing surfactants for particle suspension clean, low chip cutting. We offer field service on dicing and grinding equipment and are a certified re-builder of dicing saws.
Supplying the semiconductor industry with all types of process equipment - front end and back end, subsystems, spares and specialized filed and depot level service.
Engineers and scientists regularly use GlobalSpec to search for technical products, learn about suppliers, and access comprehensive content on standards, patents, specifications, designs, application notes and more. The world's largest parametrically searchable database of technical products, components and services, and related industrial catalogs is available on GlobalSpec.

Glocap Search (www.glocapsearch.com) Premier search firm serviing private equity, hedge funds, investment bands, consulting and industry clients.

Glocap Partners (www.glocappartners.com) Boutiquie investment banking firm assisting companies in raising private equity, PIPEs and mezzanine capital, advising on mergers & acquisitions, JVs, recaps/restructurings, and providing fairness opinions.

Glocap Advisors (www.glocapadvisors.com) Privately-held financial services firm focused on the placement of funds and the development of alternative investment products for the instutional investor.

A recruiter that includes MEMS engineering jobs among their categories.
Granta is the leading developer of Material Intelligence software systems. Applications include: rational, exhaustive material & process selection; material data management; material database publishing; material and manufacturing education.
Growthink Research publishes venture capital funding reports that analyze financing trends for emerging technology companies, including MEMS and Nanotech. In addition to publishing dozens of "off-the-shelf" funding research reports, Growthink Research also performs client-specific market and competitive research projects.
(Formerly ACT MicroDevices.) Maintains a full-service micro foundry that includes: highly characterized thin film and optical coatings, solder and microwave circuit metallization, and precision wet and dry etching. Specializes in Silicon Optical Bench Fabrication, Bulk Micromachining, Low Stress Nitrides, and Deep RIE of silicon, through both the Bosch process and the cryogenic smooth sidewall process. Most of our services are available on 100mm, 125mm, 150mm (Thin Films on 200mm). Haleos can custom engineer processes and has design and modeling expertise.
Designs, develops and manufactures high precision Direct Write Laser instruments using raster scan technology to image on various substrates such as silicon, glass, film, or other photosensitive type plates. It can be used for semiconductor masks and direct writing, integrated optics, lead frames, flat panel displays, shadow mask, MEMS, and any application where high precision, high-resolution images must be produced.
A division of Wafer Works Corp http://www.waferworks.com/ provides 3"-6" prime/test silicon wafers (single and double side polished), sapphire, notch and SOI wafers. Other capabilities include laser marking, and wafers with tight TTV.
Produces the ABAQUS http://www.hks.com/products/ products for finite-element simulation.

Hussein Ballan, Michel Declercq/Hardcover/Published 1998. Standard voltages used in today's ICs may vary from about 1.3V to more than 100V, depending on the technology and the application. High voltage is therefore a relative notion.

High Voltage Devices and Circuits in Standard CMOS Technologies is mainly focused on standard CMOS technologies, where high voltage (HV) is defined as any voltage higher than the nominal (low) voltage, i.e. 5V, 3.3V, or even lower. In this standard CMOS environment, IC designers are more and more frequently confronted with HV problems, particularly at the I/O level of the circuit.

In the first group of applications, a large range of industrial or consumer circuits either require HV driving capabilities, or are supposed to work in a high-voltage environment. This includes ultrasonic drivers, flat panel displays, robotics, automotive, etc. On the other hand, in the emerging field of integrated microsystems, MEMS actuators mainly make use of electrostatic forces involving voltages in the typical range of 30 to 60V. Last but not least, with the advent of deep sub-micron and/or low-power technologies, the operating voltage tends towards levels ranging from 1V to 2.5V, while the interface needs to be compatible with higher voltages, such as 5V.

For all these categories of applications, it is usually preferable to perform most of the signal processing at low voltage, while the resulting output rises to a higher voltage level. Solving this problem requires some special actions at three levels: technology, circuit design and layout.

High Voltage Devices and Circuits in Standard CMOS Technologies addresses these topics in a clear and organized way. The theoretical background is supported by practical information and design examples. It is an invaluable reference for researchers and professionals in both the design and device communities.

A MEMS foundry service located in Redmond, Washington, Honeywell's services range from single process step fulfillment to complete turnkey design through volume production.
HTA Photomask has been manufacturing photomasks for many years. Some of HTA's employees have forty years of experience in photomask manufacturing that dates back to the 1960's. During the years of technological progress our people have worked with e-beam, laser write, and optical manufacturing of photomasks. We have the ability to work with the customer and determine which path of photolithography is best and most economical for the customer.
HTE Labs Provides Wafer Foundry, R&D support and Specialty Wafer Fab Processing to customers from semiconductors and microelectronic industry.
We design and manufacture high precision humidity and vapor sensing solutions for aerospace, industrial, research, environmental and scientific customers around the world
Icemos Technology Ltd is a leading supplier of high quality thick film bonded SOI (Silicon On Insulator) wafers (Bonded SOI Wafers, Si-Si Bonded Wafers, and SOI+Trench and Refill). Our expertise is on trench etch and refill technology, with the ability to offer trench etch and refill services to customers on bulk Si substrates or on SOI. By combining both our SOI and trench etch and refill technology, we provide customers a unique dielectrically isolated substrate preparation service.
The fields of interest of the Council and its activities shall be the theory, design, fabrication, manufacturing, reliability and applications of devices for sensing and transducing physical, chemical, and biological phenomena.
Delhi is an autonomous statutory organisation functioning within the "Institutes of Technology Act" as amended by "The Institutes of Technology (Amendent) Act, 1963". The seven Indian Institutes of Technology (others being at Bombay, Kanpur, Kharagpur, Madras and Guwahati Roorkee) are administered centrally by the IIT Council, an apex body established by the Government of India to co-ordinate activities of these Institutes. The Minister for Human Resource Development of the Government of India is the Chairman of the Council. Each Institute of Technology has a Board of Governors responsible for its overall administration and control. Prof. V S Ramamurthy is the Chairman of the Board of Governors of this Institute.
A MEMS manufacturing company that offers services from design and prototyping to process development and high-volume manufacturing, with one of the largest 6" MEMS wafer fabs in the US.

Saint-Gobain Grains & Powders - Surface Conditioning Group

Leader in the development and manufacture of high purity chemicals and abrasives for the surface perfection of metals, ceramics, glasses and crystals. Engineered abrasive particles and biodegradable chemistries for critical surface finishing of MEMS and nanotechnology devices.

IDA MEMS Technology Transition. This web site provides a resource for contractors to locate, evaluate and initiate MEMS insertion opportunities within DoD.
As a partner for industrial companies and research institutions, we concentrate our activities on developing microdevices and systems for our customer's specific needs. Benefiting from this are companies from the fields of chemicals and pharmaceuticals, personal care, food industries, energy production, biotechnology, analytics, diagnostics, medical technology and sensor development. Our interdisciplinary teams of experts work out innovative solutions in close co-operation with the customer in order to open up market opportunities and new areas of business for them.
ISSYS provides a variety of foundry services for 4" diameter wafers, with an emphasis on high quality and fast turnaround times. ISSYS' services include single-step processing, prototyping, full manufacturing and technical consulting. Product development capabilities include sensor design, electronics design, packaging design, process development, and manufacturing.
Offers design and processing services for MEMS devices, specializing in the ability to process non-standard substrates and materials (such as plastics, ceramics, and quartz) and maskless photolithography capabilties.
Demonstrations by Peter Will, Murilo Coutinho and Adam Cohen.
A spin off from Corning IntelliSense, IntelliSense Software Corporation is the leading supplier of CAD tools for MEMS. Its IntelliSuite family of CAD for MEMS is used by corporations worldwide. With customers in 17 countries on three continents, and partnerships with dozens of leading MEMS research institutes worldwide, IntelliSense Software is the leading innovator in MEMS design and development. In addition, IntelliSense Software provides design and consulting services for MEMS.
Process Chemicals for Semiconductor, Silicon Wafer, Precision Optics & Ceramics, Flat Panel Display, Ophthalmic and Flat Glass & Mirror Manufacturing.
The book first gives brief information about the microfabrication techniques used in the MEM systems in general. Then it explains the physics and operation of the MEM devices. This device physics part is generally dedicated to components used in RF MEMS. After explaining the physics the author gives the RF MEM devices one by one, explain the RF functioning of them, and give the RF performance and comparison data for whom interested in the RF side of the subject. In general the book is a good starting point for a person who is interested in the RF MEMS subject.
by Danny Banks.
iSLI is a public sector research institute providing R&D services in silicon MEMS and it's integration into higher functionality systems. We offer access to particular expertise in Si MEMS, photonic microsystems and system integration. With our strategic alliances to research and foundry providers we can support your development needs from concept to medium scale production.
Manufactures 4/5/6/8" SOI wafers.
it4ip supplies prototype, pilot and small volumes of engineered nanomembranes, supported structures and nano-objects (nanotemplates) using our track etching technologies (creation of true pores within polymeric films or supported layers).
Services for Semiconductor Process Tools. PE, RIE & PECVD. We build new systems, repair damaged vacuum process tools and refurbish older plasma process systems. We upgrade and automate, too! We are the west coast rep. for RFVII RF Generators and Matching Networks and Tek-Temp Instruments Heat Exchangers and Precision Chillers.
Finite Element Modeling (FEM) based Process Simulation, Design Analysis and R&D. Kaizen can work with your R&D team to develop a suitable model for your processes and reduce your cycle-time. Offer total solutions in Manufacturing, Engineering, Design Analysis, Process Simulation and R&D. We are equipped with a full-fledged Design and R&D Centre in Bangalore, an advanced Manufacturing Unit in Hyderabad, India and with our USA office based at Edison, NJ.
Our actuators are based on microfabricated torsional resonators [5], rectangular grids etched out of single-crystal silicon [6] and suspended by two rods that act as torsional springs. When an AC voltage is applied between grid and adjacent electrodes, the grid oscillates at resonance frequencies in the high kHz range. The edges of the grid reach deflections of several micrometers.
Forschungszentrum Karlsruhe is one of the biggest science and engineering research institutions in Europe and funded jointly by the Federal Republic of Germany and the State of Baden-Wuerttemberg. Its research and development program is embedded in the superordinate program structure of the Hermann von Helmholtz Association of National Research Centers and concentrates on the five research areas of Structure of Matter, Earth and Environment, Health, Energy, and Key Technologies.
Kebaili Corporation manufactures compact instruments for electrodeposition, such as (direct current) DC plating, pulse plating, and periodic reverse pulse plating controllers, specifically designed for MEMS and nanotechnology applications.
Keteca USA is the leading manufacturer of wafer dicing surfactant. We also manufacture dicing saw blades and a new spin on wafer protector that comes off in a heated DI rinse after saw.

Kleindiek Nanotechnik is a young, customer oriented high-tech company. With an innovative and powerful driving concept we are entering new space in micro- and nano-positioning.

Due to miniaturisation in semiconductor technology, optics, micro-mechanics, medicine, gene- and bio-technology, highly precise positioning techniques are becoming increasingly important. Our products meet and exceed customer's requirements, offering them a new level of precision.

Laserod is a Precision Micromachining Laser Job Shop with System Integration: We scribe, drill, mark, and cut thin materials; plus pattern ITO, and trim resistors. Our tolerances are to one micron and laser cutting edge to 5 microns with cut or hole depth to 1,000 microns on any material (except glass). Specializing in silicon MEMS device cutting & drilling by laser.
Dynamic MEMS Components for Optical Networks (VOA, DGE, DCE, Blockers, switches, etc.)
Customer-specified development and production of microsystem/MEMS based products, i.e. integrated optics and microfluidics for (OEM) customers in Telecom, Industrial Process Control, Life Sciences and Space. LioniX is the result of the joining of forces of Lion Photonix Technologies BV (2001) and 3T Micro Systems Technology (1988) in 2002 and is particularly experienced in integrated optics based telecom devices and Lab-on-a-chip systems.
Maintained by William Trimmer
The Liu Research (MASS) group at the University of Illinois at Urbana-Champaign performs groundbreaking research in all aspects of the emerging technology of Microelectromechanical Systems (MEMS). This includes microfluidics, bioMEMS, optical MEMS, polymer MEMS, photonics, nanolithography, RF MEMS, CAD, simulation, advanced sensors, and basic fabrication. We take designs from "substrates to systems" and perform all fabrication locally at the UIUC Micro and Nanotechnology Laboratory. The group is organized under the Department of Electrical and Computer Engineering and headed by Dr. Chang Liu.
Logitech is a specialized supplier of cutting, lapping and polishing machines and equipment for the MEMS and semiconductor industries.
R&D on RF MEMS. Technology, Design and Test for microwave and millimeter wave MEMS: membrane supported filters and antennas, switches, phase shifters, magnetically tunable resonators.
Offers full in-house production capabilities from boule slicing and coring through CNC machining, diamond turning, and planetary lapping.
McGuinness & Manaras LLP is an intellectual property law firm providing services in the area of copyrights, trademarks and patents. We have technical expertise in the semiconductor area.
Manufacturer of cutting edge sensor and manufacturing equipment. Sensors, Technical Specialties, Measurements and Electronics.
MedMarket Diligence has published a business report detailing the technologies, products, companies and markets in the medical application of nanotechnology and microelectromechanical systems (MEMS). The report assesses the status of development of a wide range of technologies with clinical application and assesses their short to medium term market impact. MedMarket Diligence serves the interest of companies, investors and others with a stake in the medical technology industry.
Offers EM3DS, a full-wave simulation tool, fully 3D yet tailored for quasi-planar structures, suitable for EM analysis of MEMS, in particular MEMS switches. It uses a new MoM-based approach (Generalized Transverse Resonance-Diffraction GTRD), claimed to avoid the aspect-ratio limits of finite elements techniques. 60-day trial version free for download, as well as a completely free (but functionally limited) version.
MEMC is a leading global supplier of wafers to the semiconductor industry. Wafers are the fundamental building block on which nearly all microelectronic applications are made. These applications, or “devices”, make possible the Internet and electronic commerce, computers, consumer electronics, automobiles, telecommunications, industrial automation and control systems, and analytical and defense systems.
Can produce 3-dimensional microdevices in days, based on a 3-D CAD design, using the proprietary EFAB® process.
A group of MEMS-oriented companies in the Washington DC area.
The MEMS and Nanotech forum is a live forum open to all MEMS and Nanotech professionals or students to post questions and ideas or show off their work for feedback. Regional boards are available to help groups form for Microtech discussions. Technical specialty groups are taking shape for groups of people working in similar fields.
We provide fabrication services ranging from lithography, etching, sputtering, wafer bonding, wafer plating, to wafer dicing.
From Sandia National Labs.
This is a 1994 study by the Japanese Technology Evaluation Center (JTEC) and its companion World Technology Evaluation Center (WTEC) at Loyola College.
The MEMS Industry Group (MIG) is the premier trade association representing the MEMS and Microstructure industries. Our mission is to try to understand and to eliminate the barriers that prevent the greater commercial use of MEMS and MEMS-enabled technology.
MEMS Insight provides technical, business, and strategic consulting to client companies ranging from startups to multinational corporations. Services range from assistance in device design, layout, process strategy, fabrication advice and liason with foundries -- to assistance in generating new concepts and IP -- to providing independent survey look at markets, competition, and business opportunities.

MEMS Investor Journal was founded in 2003, currently has 2500+ subscribers and is the only independent publication devoted to providing MEMS professionals with the latest developments in the rapidly growing MEMS industry.

MEMS Investor Journal publishes a free weekly newsletter that is specifically designed for professionals working in the areas of MEMS, sensors and microsystems and features top MEMS stories from 7000+ sources worldwide, interviews with MEMS industry leaders as well as coverage of the latest MEMS related patents and patent applications.

MEMS Precision Instruments does leading edge research and development of techniques in MEMS. At the present time MEMS PI is focusing on compliant mechanisms for microrobotics.
The mission of this program is to investigate and apply methods and processes that support the fabrication of devices with specific commercial applications in mind and to train students in processes and procedures that are encountered in industry.
Microelectromechanical Systems (MEMS) research at Case Western Reserve University is an interdisciplinary effort comprising faculty, staff, visiting scholars, and students from four academic departments. Our group brings together experts in all facets of MEMS -- design, modeling, fabrication, materials, devices (sensors, actuators, and electronics), and applications -- to address the critical scientific and technological issues for advancing MEMS.
MEMS TC provides MEMS and MNT related Product Development, Technical Consultancy, Editing of Technical Manuscripts and Regional Representation.

DARPA MEMS Related Programs

These links are intended to be front doors into the various research organizations. In some cases, it will be necessary to browse a number of pages at a given site to find detailed descriptions of specific MEMS programs. This list is not exhaustive, and it is continually being updated.

Provides development, design, and manufacturing of MEMS to OEMs. Specializes in wireless and optical communication, sensors, and CAD services.
MEMSConcepts.com is the worldwide MEMS and Nanotechnology idea-exchange platform, where MEMS innovators and idea seekers meet to network and build strategic alliances, find licensing, funding or commercialization opportunities, follow the latest cutting-edge research trends, or get inspiration.
Focuses on MEMS-related openings.
A consortium dedicated to the design and production of MEMS components on SOI.
MEMStaff provides specialized technical staffing (recruiting and placement) focused exclusively on the MEMS industry.
Mentor Graphics® is a technology leader in electronic design automation (EDA), providing software and hardware design solutions that enable companies to develop better electronic products faster and more cost-effectively. The company offers innovative products and solutions that help engineers overcome the design challenges they face in the increasingly complex worlds of board and chip design. Mentor Graphics has the broadest industry portfolio of best-in-class products and is the only EDA company with an embedded software solution.
MESA+ is one of the largest nanotechnology research institutes in the world, delivering competitive and successful high quality research. It uses a unique structure, which unites scientific disciplines, and builds fruitful international cooperation to excel in science and education. MESA+ has created a perfect habitat for start-ups in the micro- and nano-industry to establish and to mature.
We manufacture and sell thin film analytical instruments that measure physical, optical, and thermal properties of thin film materials that are used in MEMS fabrication.

Bartlomiej F. Romanowicz/Hardcover/Published 1998. Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In the near future, there will be a number of new devices, which will be commercialized in many application areas.

The field of microsystems is characterized by its wide diversity, which requires a multidisciplinary approach for design and processes as well as in application areas. Although there is a common technological background derived from integrated circuits, it is clear that microsystems will require additional application-specific technologies. Since most microsystem technologies are based on batch processing and dedicated to mass production, prototyping is likely to be an expensive and time-consuming step. It is recognized that standardization of the processes as well as of the design tools will definitely help reduce the entry cost of microsystems. This creates a very challenging situation for the design, modeling and simulation of microsystems.

Methodology for the Modeling and Simulation of Microsystems is the first book to give an overview of the problems associated with modeling and simulation of microsystems. It introduces a new methodology, which is supported by several examples. It should provide a useful starting point for both scientists and engineers seeking background information for efficient design of microsystems.

Conducted by Professor M. Elwenspoek, MicMec is part of the MESA Research Institute at the University of Twente, The Netherlands. It is one of the leading groups in the world in the field of MicroSystem Technology (MST) in general and MEMS in particular.
Micralyne develops and manufactures microfabricated and MEMS-based components. Micralyne provides OEM manufacturing for several industries including communications, automotive, and biomedical applications. Its MEMS solutions include lab-on-a-chip devices, sensors, and optical switch systems. Micralyne has developed core competencies in several specialized fields including micromachining, thin film technologies, microfluidics, and associated characterization and assembly capabilities.
Promotes commercial development of micro- and nanotechnology.
Web Pages of Karl Böhringer contain information, papers, and animations about manipulation strategies with microfabricated actuator arrays. The electrostatic actuators are fabricated in a single-crystal silicon etching and metallization (SCREAM) process. They were built in the National Nanofabrication Facility at Cornell University.
At the University of Utah
Publications and Dissertations http://utep.el.utwente.nl/tt/publications/index.html of the Micro Mechanical Devices Group (MicMec) http://www.el.utwente.nl/tt/ of the University of Twente, The Netherlands
Electrical, Magnetic, Thermal, Optical,Chemical & Smart Structures, by Massood Tabib-Azar/Harcover/Published 1997

Benjamin W. Chui/Hardcover/Published 1998. Microcantilevers for Atomic Force Microscope Data Storage describes a research collaboration between IBM Almaden and Stanford University in which a new mass data storage technology was evaluated. This technology is based on the use of heated cantilevers to form submicron indentations on a polycarbonate surface, and piezoresistive cantilevers to read those indentations.

Microcantilevers for Atomic Force Microscope Data Storage describes how silicon micromachined cantilevers can be used for high-density topographic data storage on a simple substrate such as polycarbonate. The cantilevers can be made to incorporate resistive heaters (for thermal writing) or piezoresistive deflection sensors (for data readback).

The primary audience for Microcantilevers for Atomic Force Microscope Data Storage is industrial and academic workers in the microelectromechanical systems (MEMS) area. It will also be of interest to researchers in the data storage industry who are investigating future storage technologies.

MicroChem Corp. (MCC) develops, manufactures, sells, and supports specialty niche chemicals for semiconductor/IC, thin film head, and other electronic manufacturing applications. The primary focus is photosensitive materials, such as photoresists, and other ancillary products. MCC technology consists of proprietary and non-proprietary products requiring state-of-the-art technical expertise, high reproducibility, high product cleanliness, and specialty microfiltration.
A newsletter covering all of the technologies used for projection and virtual display based applications, including MEMS technology for reflective display devices.
Information on research conducted at The University of Texas at Austin by Dr. Dean P. Neikirk into optical pressure sensors, magnetic proximity sensors, and the use of MEMS technology for "smart" mechanical bearings can be found here.
Has 7 research groups working with different aspects of MEMS, from nanoscience to BCMS and MOEMS.
Provides MEMS foundry services for large and small volumes (4" and 6" wafer processing). Applied technologies are bulk- and surface micromachining including silicon deep trench etching (DRIE, Bosch Process), wafer bonding, thin film depositions, and 3D microforming.

Mark R. Hornung and Oliver Brand/Hardcover/Published 1999. Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems.

Micromachined Ultrasound-Based Proximity Sensors describes a cost-effective approach to the realization of a micro electro mechanical system (MEMS). The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques. Additionally, this approach allows the cointegration of the driving and read-out circuitry. To ensure the industrial applicability of the fabricated transducer elements intensive long-term stability and reliability tests were performed under various environmental conditions such as high temperature and humidity.

Great effort was undertaken to investigate the packaging and housing of the ultrasound system, which mainly determine the success or failure of an industrial microsystem. A low-stress mounting of the transducer element minimizes thermomechanical stress influences. The developed housing not only protects the silicon chip but also improves the acoustic performance of the transducer elements.

The developed ultrasound proximity sensor system can determine object distances up to 10 cm with an accuracy of better than 0.8 mm.

Micromachined Ultrasound-Based Proximity Sensors will be of interest to MEMS researchers as well as those involved in solid-state sensor development.

The Amazing World of the Ultrasmall, by David Darling/Paperback/Published 1995
Sells golf shirts, t-shirts, mugs, computer goodies and more for the high-tech individual. Mems and NanoTechnology gifts for the high tech professional.
Micromanipulator manufactures a full range of accessories from low cost probe tips to manipulators, thermal chucks and accommodates OEM test equipment. Micromanipulator is at the forefront of emerging technologies used in the Semiconductor Industry such as sub-micron probing, copper oxide, double-sided backside, MEMs, Bio-MEMS Tools and stations, vacuum prober, and testhead prober. Micromanipulator; Analytical Probing for ProfessionalsTM Tel: 775-882-7377
Supplier of 3" 100mm and 125mm silicon epi wafers, including p+ etch stop, high resistivity, and very thick epi layers.
A company specialized in the rapid prototyping of microfluidic glass and silicon devices. Micronit holds IP rights on IP generated at the MESA+ research institute and offers prototyping services to customers all over the world.
The Microsensor & Actuator Technology Berlin (MAT) is part of the research unit "Microperipheric Technologies" of the Technical University of Berlin http://www.tu-berlin.de and was founded in 1987. Prof. Dr.-Ing. E. Obermeier http://www-mat.ee.tu-berlin.de/staff/e_obermeier.html is the head of the MAT. Today more than 30 research scientists http://www-mat.ee.tu-berlin.de/staff/personen.html are working on the field of sensor and actuator development. Main topics are the development and realization of sensors for measurement of pressure, force, acceleration, temperature, humidity, gas flow and gas concentration. Modern computer aided design methods like FEA http://www-mat.ee.tu-berlin.de/service/simulation.html are used to optimize the sensor characteristic. The cleanroom facilities http://www-mat.ee.tu-berlin.de/service/simulation.html include standard CMOS processes and numerous special processes, e.g. anisotropic etching, electrochemical etching and anodic bonding. Computer controlled test systems are used to characterize the devices.
By Richard S. Muller, Roger T. Howe, Stephen D. Senturia, R. Smith
By Julian W. Gardner/Paperback/Published 1994
The Microsystems Center Bremen (MCB) is an R&D centre providing services in the fields of microsystems, microelectronics, power semiconductors and optoelectronics. Its main focus is in the modelling, simulation, development and manufacturing of micro systems and the design of analogue and digital circuits, in particular for biomedical, automotive and environmental applications. The technologies available at MCB range from silicon and special material micro structuring over semiconductor epitaxy, micro forming and additive techniques to assembly technologies and micro components packaging.
microTEC offer the customer specific development and contract manufacturing of components, microsystems and microstructures, as prototyping as well as batch production.
MMD has no internal products, providing the customer with complete confidence that intellectual property is secure and will never find its way into other competing products. MMD targets emerging to medium production volumes ranging from thousands to a few million devices per application.
Provides microparts and micromolds, produces its own photoresist (SU-8) and has UV-LIGA competence.
MISTIC is a planar process compiler for thin-film and micromachined devices. This tool automatically generates fabrication process flows starting from a two-dimensional geometrical device description. The synthesis method used is based on topological sorting techniques which find all possible flows for the device. An optimal flow is selected which maximizes the device yield.
Microsystems Technology Laboratories (MTL) is an interdepartmental laboratory that supports Microsystems research encompassing work in circuits and systems, MEMS, electronic and photonic devices, and molecular and nanotechnology. Our research is enabled by a set of shared experimental facilities, as well as a vibrant industrial consortium. Annually, MTL supports the research of 350 students and staff who are sponsored by contracted research of more than $40M.
Montco has a large diverse inventory of silicon wafers in stock at all times. They provide 2" to 300mm diameter wafers in silicon as well as other materials, bare or with custom films.
The MOSIS Fabrication Service of USC/Information Sciences Institute is a prototyping service for standard cell and full-custom VLSI circuit development. MOSIS is in the process of expanding their service to include MEMS devices.
We’re scientists. We’re artists. Most of all, we are a global communications leader, powered by, and driving, seamless mobility. Motorola is revolutionizing broadband, embedded systems and wireless networks – bringing cutting-edge technologies into your everyday life, with style.

Innovative x-ray components and optical polarizers x-ray products and optical polarizers

MOXTEK®, Inc. was founded in 1986 with technology jointly developed with Brigham Young University. Today, MOXTEK is a leader in the development and manufacturing of X-ray and optical components. Moxtek is well known for advanced technology, innovative solutions, and excellent customer service.

MST News is a quarterly Newsletter for the European MST Community.
Innovative Ph.D. provides consulting in chemistry and materials science, including inorganic chemistry, polymers, ceramics, metals. Expertise in developing chemical mechanical planarization slurries for MEMS-related applications.
We are an R&D firm specialized in design, prototyping and manufacturing of various MEMS/NEMS systems, devices and components.
The Nano Science and Technology Institute is an interdisciplinary consultancy focusing on all aspects of nanotechnology. NSTI assists industrial, academic and governmental organizations realize their technology objectives through our successful research and development team. NSTI produces the annual Nanotech conference and trade show, the largest international nanotechnology convention in the world.
Nano-Tsunami is an Independent non-profit European based NanoTech News Portal offering daily headline news about the emerging MNT, micro- mems- and nanotechnology industry, from all around the globe, as well as forthcoming NanoTech products as and when they emerge.
NANO-MASTER manufactures single wafer PECVD, MOCVD, RIE, Deep RIE, Sputtering, and Megasonic Cleaning tools for MEMS applications. NANO-MASTER also distributes HA-701 ultrasonic fault detection and Sawatec resist spinners and pumps.
also offers daily MEMS news and a sizable collection of links.
NN-Labs provides high-quality nanocrystals and nanocrystal based products to researchers and industry around the world. Our nanocrystals are offered in a wide range of wavelengths and in large quantities for the lowest prices available.
RF MEMS and nanotechnology research, consulting and education. RFIC design and RF device modeling. CMOS and BiCMOS RF MEMS design. Technical assistance to entities developing RandD proposals. Technical assessment of business plans and opportunities on behalf of entrepreneurs or venture capital firms.
Nanonex offers nanoimprint lithography (NIL) tools, resists, masks and consulting which are all being used in both research and manufacturing by industry and academia. Nanonex's NIL products offer sub-10 nm features, 3D patterns, large area uniformity, accurate overlay alignment, high-throughput, and low cost. The Nanonex NIL solution includes all forms of nanoimprinting, such as thermal plastic, uv-curable, thermal curable, and direct imprinting (embossing).
The information resource for particle technology. Use this site for finding meetings and conferences, particle suppliers and standards, particle-based materials, particle characterizatioan instruments, particle and dispersion processing and manufacturing equipment and services, publications, primers, the Encyclopedia of Particle Technology, courses, workshops, consultants, and a wide variety of related links important in particle technology.
A new approach within advanced graphics simulations is presented for the problem of nano-assembly automation and its application for medicine. The problem under study concentrates its main focus on nanorobot control design for assembly manipulation and the use of evolutionary agents as a suitable way to enable the robustness on the proposed model.
At Nanoshift we advance emerging technologies by dynamically developing concepts into reality. We provide research and development services in Bio-MEMS, MEMS, Micro and Nanotechnology. Our vision is to bring excellence in scientific advancement, application and commercialization of novel concepts.
Emphasizes nanotechnology, but also has some MEMS coverage.
Micro-Instrument Technology Program at NASA
Our core business ranges from developing and prototyping to producing SPM sensors, SNOM sensors microgrippers and micromechanics for application in R&D, characterization of surface topography and process control.
The Department of Mechanical Engineering at National Cheng-Kung University (NCKU) has been established since 1931, and is the oldest and the most renowned mechanical engineering institutes in Taiwan. Our alumni and alumnus occupy important positions in Taiwan’s industries, business, and governmental institution. In addition, numerous faculty members of Taiwan and world’s leading universities are also graduated from this department. A local survey reveals that alumni from NCKU have being the most welcome employees by Taiwan business companies. Each year, 150 undergraduate students, 171 master students (including 20 part-time students), and 60 Ph.D. students are enrolled in this department each year. Currently, this department is consisted of 47 full time professors, 11 adjunct professors, 600 undergraduates, 300 master students, and 150 Ph.D. students.

From automated teller machines and atomic clocks to mammograms and semiconductors, innumerable products and services rely in some way on technology, measurement, and standards provided by the National Institute of Standards and Technology.

Founded in 1901, NIST is a non-regulatory federal agency within the U.S. Commerce Department's Technology Administration. NIST's mission is to promote U.S. innovation and industrial competitiveness by advancing measurement science, standards, and technology in ways that enhance economic security and improve our quality of life.

The ATP's mission is to stimulate U.S. economic growth by developing high risk and enabling technologies through industry-driven cost-shared partnerships.
Design of MEMS devices ranging from Accelerometers to RF MEMS.
Die and mask handling tools, vacuum wands, tweezers, vacuum pumps, tubing, and other precision parts Handling kits, ESD safe products and tweezers for 300mm wafer handling are also available.
The Microelectronics Fabrication Center provides design, fabrication, and fast-prototyping services of MEMS, BioMEMS, biometrics sensor arrays, chemical sensors, and microfluidic devices. Class-10 and Class-1000 cleanrooms are equipped for processing of 3-, 4-, 5-, and 6-inch wafers. Using cutting-edge microfabrication technologies MFC acts as an interface between industry and academia. Our team of engineers meets all requirements of excellence in the partnership with industry.
Provides design and fabrication services of MEMS devices in a number of application areas including SiOB for fiber optic communications, and microfluidic devices for bioanalysis.
The Microfabrication Laboratory (MFL) supports graduate and undergraduate education by providing access to microfabrication technology. The laboratory conducts microfabrication-related research, primarily in the area of microelectromechanical systems (MEMS). In MEMS, the laboratory's areas of expertise include surface micromachining, with an emphasis on metal surface micromachining using the Northeastern University MEtal Micromachining (NUMEM) process and bulk micromachining including anisotropic etching and alloy bonding.
The College of Nanoscale Science and Engineering of the University at Albany is the first college in the world dedicated to the research, development and deployment of innovative nanoscience, nanoengineering, nanobioscience and nanoeconomics concepts. CNSE's Albany NanoTech complex - a $3.5 billion, 450,000-square-foot facility that has attracted over 250 global corporate partners - is the most advanced research complex of its kind at any university in the world.
For over 30 years, OAI has been a leader in process equipment for the semiconductor, MEMS, nanotechnology and microfluidic industries. Products include front and backside mask aligners, anodic wafer bonders, UV light sources, and UV exposure systems. Process assistance is available.
The Ohio MEMS Association, Inc. is a non-profit organization fostering public awareness of Micro-Electro-Mechanical-Systems (MEMS, or "microsystems") products. Our activities include:
  • Symposia on MEMS business and commercialization issues,
  • MEMS training and awareness programs, and
  • Technology cluster hosting for MEMS entrepreneurs.
The purpose of this project is to establish a statewide fabrication, design, and testing infrastructure capability for the new and growing field of microelectromechanical systems (MEMS). MEMS devices are emerging as product performance differentiators in both commercial and defense markets such as automotive, aerospace, medical, industrial process control, electronic instrumentation, office equipment, appliances, and telecommunications. Integrated circuit technology (IC) has brought unprecedented computational power ever closer to the point of use. MEMS enables the development of smart products by providing the required interface between the available computational power and the physical world through the perception and control capabilities of sensors and actuators.
Produces high quality silicon wafers for MEMS / MOEMS and semiconductor industries. Product range includes SSP / DSP, epitaxial, Silicon on Insulator (SOI) and Silicon Carbide (SiC) wafers. For further information please contact us at sales@okmetic.com or visit our web site.
Olympus Industrial provides the complete range of Olympus microscopes including confocal laser scanning microscopy systems and DUV microscopes for MEMS visualization and 3D measurement.
Ommex provides innovative photonic microsystems using patented LED technology. Our products include high power UV LED modules with peak emissions as low as 260 nm. These products are ideal for lab-on-a-chip type applications. We also provide a full range of technical consulting services in the areas of bio-photonics, optics, micro-fluidics and micro-systems.
OptiSwitch Technology Corp. specializes in design, fabrication, and testing of high power semiconductor devices and optical systems using TSUPREM-4, MEDICI, SPICE, and ZEMAX models. Foundry services, available for up to 4-inch wafers with thicknesses up to 3000 microns, include double sided photolithography, POCl3 and BBr3 liquid source doping, high temperature diffusion, oxidation, wide range of wet processes, and aluminum metallization up to 25 microns. Metrology services include thin-film thickness measurement, 4-point probe measurement, C-V/C-T measurement, minority carrier lifetime and iron contamination mapping.
High quality and cost effective solutions based on Interferometry - Shearography - Holography - Structured illumination
Supplies plasma etchers (RIE, ICP), PECVD equipment, RF sputterers and ion beam equipment to the photonics and MEMS markets. Supports customers all over the world and have a license to sell the 'Bosch' deep silicon process.

PELCHEM, the chemical division of Necsa, is focused on manufacturing and marketing a wide variety of high quality, advanced fluorochemicals and value added downstream products for the global fluorochemical industry.

We offer stock holding on our site for all our contracted customers. We support the principles and practices of safe handling of Fluoride Chemicals, from both the USA and European Technical Committees.

A database of mechanical properties of polycrystalline silicon. Also a collection of references for papers written since 1980 that report the mechanical properties of polycrystalline silicon is now available on the The Berkeley Sensor and Acuator Center http://bsac.eecs.berkeley.edu web site. There is also a collection of papers that report devices made by surface micromachined polycrystalline silicon.
PHANTOMS network allows a nanotechnology community building and integration within the European Research Area (ERA) and represents a "single entry point" for those seeking information about Nanotechnology and especially Nanoelectronics.
An intellectual property law firm providing U.S. and International patent preparation and prosecution services in microsystem technologies.
PhoeniX develops software for Micro System Technology to provide the bridge between the design team and the real clean room environment. The software facilitates the communication from design into production and back. Re-usability, validation, and quality improvement of information, from research to volume production, are the key factors for efficient MST product development and reducing the design/production cycle. PhoeniX introduces unique software tools that facilitate First Time Right design (FTR) for various application areas, including Integrated Optics, Micro Mechanics and Nano technologies.
Photomask manufacturer. Manufacturing lines include (but are not limited to) optical and linear encoders, decoders, reticles, scales, lenticular, Fresnel and other lenses, waveguides and filters. To complement its manufacturing lines, Photo Sciences has added three new Heidelberg laser writers to service the MEMS, photonics and nanotechnology communities.
The Photonics Industry's Home Page
Photonics has listings of MEMS-related job openings.
High precision glass wafers for MEMS from 2 to 12 inches with optional holes. Standard wafer supply from stock.
Pragmatic Instruments is a San Diego-based manufacturer of Arbitrary Waveform Generators, Voltage Standards, MEMS Driver Systems, and other custom signal generation products for novel test applications.
Preciseley provides design, modeling/simulation and optimization of Optical MEMS devices, as well as microfabrication process development and device prototype.
On-demand optical fabrication and thin-film coatings.
PTI specializes in the refurbishment of Applied Materials Tools including the P5000, Centura, and Endura. We carry tens of thousands of used semiconductor equipment.
In this introductory chapter, the definition and history of tribology and their industrial significance are described, followed by origins and significance of an emerging field.

Profma produces and supplies polyimide film equivalent to Kapton HN,VN,FN, and has developed FN616 equivalent for market. See: http://www.profma.com/polyimide.htm

Profma has the only Chinese factory producing large NiZn ferrite magnets for research institutes or universities; particle, neutron and electron accelerators, also used in high pulse electricity systems. See: http://www.profma.com/baseterms.htm

A FEM analysis, and Process modeling company with interdesciplinary expertise in design and optimisation. Has experience with thermal, fluid, and mechanical analysis of micro / nano systems.
Protochips supplies design and fabrication services targeting the university, research, small-company and start-up markets. Our prototyping services are tailored to meet the needs of individual customers. We perform process development and fabrication, from small samples to 6" wafers, in a well-supported and professionally-managed cleanroom environment. Our materials experience includes silicon, GaAs, glass / quartz, polyimide, polysilicon, silicon nitride, spin-on-glass, and a variety of metals.
Provides design, development, and manufacturing of customer-specific MEMS. Capabilities include high aspect ratio silicon etching (Bosch- and cryo-process) and standard MEMS technologies. Main application fields are micro-fluidic systems, micro-optical devices (e.g. glas fiber coupler), and silicon tools for injection molding and hot embossing processes.
Provides access to various Internet resources for students, researchers and practitioners in the physical sciences, including material science.
PVA TePla America is a leading supplier of gas plasma treatment systems and services for Semiconductor, Industrial and Medical applications. PVA TePla has successfully developed a plasma process to remove SU-8 by plasma ashing.
QUALCOMM MEMS Technologies (QMT) is bringing a revolutionary reflective flat-panel display (iMoD) to the consumer market. Using MEMS technology, iMoD displays employ interference! to generate color, providing a low-power, low-cost, color display without the use of a color filter, liquid crystal or TFT back-plane. QMT has facilities in Campbell, CA, San Diego, CA and Hsinchu, Taiwan.
Our solutions range from component to module level manufacturing. Our major focus is on automotive, medical and mobile applications. Our services include contract manufacturing services as well as sensor packaging solutions.e
Specializes in helping measurement and control businesses with market research, new product R&D, and market development. Has developed and marketed a number of industrial instruments that have made use of MEMS technology.
RFIC Solutions Inc. has designed MMIC's like LNA,PA,Mixer,Switches on 0.5µm E/D p-HEMT process.These IC's are available as IP Cores & can be modified to meet your specific requirements.
Rhetech is a Semitool company selling new and fully remanufactured semiconductor equipment and Semitool spray processors for MEM/s Nano fabrication ( flip chip packaging and microelectromechanical systems manufacturing).
Quick turnaround film deposition on wafer sizes up to 200mm. Rogue Valley Microdevices can provide you with high quality oxide and nitride films in our class 100 cleanroom.
Service Support Specialties, Inc. (S-cubed) designs and manufactures Photolithographic Process Tools, coat/develop/bake as well as Wafer and substrate cleaning systems. The systems are available as fully automated cassette to cassette robotic handling processors or as manually loaded systems.
Specialists in sensing and sensor driven information systems.
Develops and manufactures a wide variety of unique deposition (PECVD), dry etching (RIE and ICP), and surface treatment systems (UV-Ozone Cleaners) for a worldwide network of major industrial customers and academic facilities. Provide process expertise and turnkey systems to major manufacturers in the compound semiconductor, optoelectronics, MEMS and other industries.

SAMLAB, standing for the Sensors, Actuators and Microsystems Laboratory, is part of the Institute of Microtechnology (IMT) of the University of Neuchâtel. SAMLAB is located on the premises of the technological center at Rue Jaquet-Droz 1, together with the "Centre Suisse d'Electronique et de Microtechique SA" (CSEM), as well as the newly established incubator NEODE.

SAMLAB has well-established expertise in micro- and nanotechnology. Multi-disciplinary research activities have encompassed many diverse applications from the life sciences to telecommunications. Microfabricated probes for atomic force and near field optical microscopy, micromechanical devices for optical fibre networks, discrete microsensors and miniaturised chemical analysis systems for environmental and clinical analyses, and micro-instrumentation for space research are examples of SAMLAB current research activities.

category at the Open Directory Project.
The enabling technology for the design and development of glass and quartz microfluidic devices and microbore flow cells, specialising in rapid prototyping and smaller scale production. The only company to successfully merge traditional glass and quartz engineering with microfabrication and thereby giving industry and academia access to a unique range of skills.
Every VLSI engineered at SCL holds the story within itself. Perhaps because it is not just getting manufactured in a plant but is born in a sensitive environment, where men and machines are all geared towards achieving excellence. SCL was set-up in 1983, in the green, unpolluted environs on the outskirts of Chandigarh - a city designed by the French architect Le Corbusier, just 250 kms northwest of the India's capital New Delhi. SCL is a wholly owned Govt. of India Enterprise. With its objective to design, develop and manufacture VLSI circuits and VLSI based systems and sub systems, and to create a strong R&D base, SCL entered into a technical collaboration with American Microsystems Inc. USA and in 1984 commenced commercial production in 5 micron CMOS technology. Through intensive in-house R&D efforts SCL developed and brought into production the next generation 3 micron, 2 micron, 1.2 micron, 0.8 micron CMOS as well as EEPROM and CCD technologies. Latest addition to its capability is the newly established state-of-the-art MEMS Fab facility.
Semiconductor related resources for the semiconductor industry
Provides links to all manner of semiconductor and microsystems related information, including fabrication facilities, research activities, standards work, etc.
Full service recruitment firm specializing in the MEMS, Nano, and Semiconductor Industry.
Vacuum coating systems. New, Remanufactured & Used (Pre-owned) systems for the MEMS and High-Tech Industries. Solutions to meet both your process and budget needs. Thin Film Coating Service and Process Development.
SemiProbe provides MEMS wafer level test systems that allow users to reduce the cost of the final product by only packaging Known Good Die. We have R & D, characterization and production test systems.
Semitool is a world leader in innovation and manufacturing of precision semiconductor manufacturing equipment. For over a quarter century, Semitool has delivered the most cost effective, innovative and robust production equipment for semiconductors. Semitool continues to be ‘technology that works’.
A Comprehensive Survey : Mechanical Sensors, by H.H. Bau, N.F.Derooij,B.Kloeck
Monthly Up-dated Smart Sensors Web Portal
Sensortechnics offers a wide range of basic pressure sensors, rugged transmitters and customised pressure sensing systems from pressure ranges of 1 mbar up to 1000 bar as well as pressure switches, submersible sensors, force and flow sensors.
The European distributor for Prime-Test-Monitor wafers and special services. They provide 2" to 300mm diameter wafers in silicon, bare or with custom films.
The vision of SiGen is to become the leading provider of cost effective manufacturing solutions for advanced material substrates of exceptional specification for the microelectronic and photonic industries through the SiGen NanoTec™ suite of process technologies.
Sigma-Aldrich offers high-purity metals/salts, metal-organic deposition precursors, polymers, silicon wafers, single crystal substrates, fullerenes and low-k materials for your MEMS/NEMS needs. See us for your research and manufacturing needs.
Signatone Probing Division offers failure analysis probing equipment for MEMS and many other devices. Use our probe stations to view your MEMS, power them up and probe them.
Offers design, development and volume manufacturing of MEMS components primarily for customers in the telecommunication and life science markets. Specialties include bulk micromachining with etching, V-groove and DRIE, anodic, fusion, adhesive and solder bonding, surface micromachining with multilayer polysilicon, polyimide/BCB dielectrics for RF applications, and electroplating and electroless bumping of gold, nickel and solder tin. Components are developed and fabricated in state-of-the-art class 10-10000 cleanrooms using 4", 6" and 8" diameter wafers.
CMP and oxidation services.
Silicon Sense, Inc.
  • Connects semiconductor materials and custom foundry/fabrication technologies to technology and growth-oriented organizations for R&D or large-scale chip production.
  • Provides silicon, germanium, and gallium arsenide to address issues related to MEMS, ASIC, CMOS or multi-metals layer devices.
  • Offers process services including normal thin films, metalization, photolithography, ion implant, ion beam milling and epitaxy.
  • Supports manufacturers with contract commercial development marketing services.
Manufactures and distributes custom test and prime grade silicon wafers for the semiconductor industry. Services include wafer reclamation and recycling.
The simulation package SIMODE/QSIMODE contains complete simulation support for orientation dependent etching. It is developed by GEMAC mbH http://www.gemac-chemnitz.de/ and the University of Chemnitz.
SIMYX Technologies is a MEMS package design and development company located in Shanghai China. Our OCQFN package is well suited for Pressure Sensors, Accelerometers, Gyroscopes and Image Sensors.
Test Objects, Tools and Precision Parts for Imaging
A leading MEMS contract manufacturing and technology company, specializing in design, fabrication, packaging and productization services for the MEMS, Optics, Photonics, and Nanofabrication Markets.
SmallTech, LLC is a consulting company specializing in MEMS and Nanotechnology, providing companies with solutions for their technical, IP and business strategy challenges. On the technical side, SmallTech offers services to help with commercialization of new technologies, ranging from concept development, design, modeling and layout, to serving as a liaison with foundries from first prototyping to commercial production. On the strategic side, SmallTech performs market and business evaluations, as well as IP development, including IP evaluation, technology matching, and invention.
News about Micro and Nanotech Manufacturing Tools and Materials.
The leading supplier of SOI wafers and other engineering substrates
Manufactures optical and laser-based non-contact measuring systems. The automated and semi-automated 3D inspection tools are ideal for the surface profile analysis http://www.solarius-inc.com/html/mems.html of MEMS structures providing sub-micron accuracy.
International magazine for semi-conductor manufacturing
Manufactures equipment for ultrasonic inspection of silicon-on-silicon or silicon-on-insulator wafers, with both have manual and automatic wafer handling systems.
South Bay Technology, Inc. Manufactures Materials Processing Equipment for applications in Electron Microscopy, Optical Microscopy, Metallography, Microelectronics and Single Crystal Processing. Products include wire saws and diamond wheel saws for precision cutting; lapping and polishing machines and fixturing for controlled surface preparation; 2 and 3 axis goniometers for orientation, cutting and polishing of single crystals; ion milling, dimpling, disc cutting and plasma cleaning systems for TEM sample preparation; ion beam sputter deposition and etching systems to prepare fine grain thin films for high resolution imaging using FESEM; plasma etching, reactive ion etching (RIE) and backside polishing systems for microelectronic processing; and high precision polishing systems for Nanotechnology applications.
SCME is a National Science Foundation grant funded regional educational center that creates curriculum for teachers in higher education that is used for teaching students about MEMS design and fabrication methods.
Equipment provider for MEMS and semiconductor manufacturing applications. Sells full line of processing equipment for MEMS manufacturing including wafer steppers, photoresist/SOD spin coat/develop tools, inspection systems, deposition tools and dry etch tools.
Designer and manufacturer of CHR150 high resolution non contact distance measuring sensors and MICROMESURE 3D non contact Surface Analysis Systems.
SupplyFrame is a free engineering search system for researching electronic components. SupplyFrame offers datasheets, cross-referencing, sources, lead times and prices for nearly 3M electronic components.
SSI's products include Wafer ID Exposure Systems and Rapid Thermal Annealers designed specifically for R&D and pre-production level processes for the *advanced materials, nanotechnology, MEMS and compound semiconductor markets.
Manufacturer of cassette-to-cassette cluster and single/batch loadlocked plasma etch and deposition systems, that can be configured with ICP, RIE, XeF2 and PECVD sources. Products include the market-leading ASE® deep silicon etch process for MEMS/MOEMS micromachining. STS offers worldwide customer support through a network of international service centres and agents.
New & used test equipment, fiber optics, fusion splicers, lab, semiconductor manufacturing and scientific equipment.
Supplier of production and process technology for the semiconductor and related industries. For more than 10 years the company has successfully developed equipment for MEMS processing. SUSS products include coating developing systems, proximity lithography systems, substrate bonders, device bonders, wafer mounters and probe systems. Process assistance available on request.
Suzhou Dexlu Materials and Tech Co., Ltd is one of the biggest insulation material suppliers in China. Our main products include polyimide film (similar to Kapton HN), polyimide FEP film (similar to Kapton FN), polyimide adhesive tape, rigid laminated products (such as phenolic paper laminate sheet, phonelic cotton laminate sheet, G10/FR4 etc), and flexible laminate products (such us DMD, NMN, NHN etc.), which are widely used in electrical insulation from class B to class C. Also we can make all kinds of die-cut parts, gaskets, and mold parts according to your designs.
Supply the insulation materials with the best competitive quality and price such as Polyimide Film(similar to Kapton HN), Polyimide FEP Film (similar to Kapton FN), polyimide adhesive tape with silicone/acrylic (Kapton) , Rigid Laminated Products, Flexible Laminates, Mica Products, and Fiberglass Products, NMN, DMD, NHN, SMC, DMC, DIE-cut,G10/FR4, Prepreg DMD, Fiberglass sleeving and tubing,machined parts, die cuts, molded parts etc.
Large area deposition (up to 600x720 mm substrate size); 6" plasma etching, 6" lithography including coating/developing, metrology including SEM, surface roughness, optical measurement, etc. Also process development consultation.
Synopsys, Inc. (Nasdaq:SNPS) is a world leader in delivering semiconductor design software, intellectual property (IP), design for manufacturing (DFM) solutions and professional services that companies use to design systems-on-chips (SoCs) and electronic systems. The company’s products enable semiconductor, computer, communications, consumer electronics and other companies that develop electronic products to improve performance, increase productivity and achieve predictable success from systems to silicon.
Provides design tools for IC, MEMS, and MCM applications.
  • T-Spice Pro Designer - IC Simulation and Modeling
  • L-Edit Pro - IC Layout and Verification
  • Other Tanner Tools http://www.tanner.com/EDA/
Provides FREE Advertising & E-Mail Network for used MEMs Manufacturing Equipment.
TEGAM, Inc. offers flexible, modular MEMS driver solutions. Create a custom combination of precision signal generatiors, signal amplifiers, and signal creation software to fit your needs.
Provide quality testing equipment Fluke, Tektronix, TekNet, Hewlett Packard Electronics is a global provider of quality reconditioned electronic test instrumentation.
TekMark is a leading technology, marketing and strategic management consulting firm. We help technology and engineered product based companies grow through a variety of proven processes and programs focused on new business development, new product development, technology commercialization, channel management, technical research, competitive analysis and overall strategy development. Market, product and focus areas include MEMs devices, semiconductors, nanotechnology, electro-optics, photonics, sensors, thin-film processing equipment, metrology systems, test & measurement, and other similar devices and equipment.
Offers precision silicon wafer grinding and polishing at its state-of-the-art CMP Center. The Center routinely grinds and polishes wafers to submicron TTV for THAT's internal use, and is fully capable of providing the extremely tight tolerances needed for bonded wafer, dielectric isolation, MEMS, optical devices, and other precision technologies.
Since 1960 The Aerospace Corporation has operated a federally funded research and development center in support of national-security, civil and commercial space programs. We're applying the leading technologies and the brightest minds in the industry to meet the challenges of space.
The Berkeley Sensor and Actuator Center (BSAC) is a NSF/Industry/University cooperative research center funded by the National Science Foundation and a consortium of corporations and government agencies. Since its foundation in 1986, BSAC has been devoted to research on sensors and miniature moving mechanical elements that take advantage of the remarkable progress made in IC technology.
The CMU MEMS Laboratory is developing miniature sensor and actuator systems made using batch-fabrication processes, especially integrated-circuit fabrication processes. This lab. is associated jointly with the Department of Electrical and Computer Engineering (ECE) http://www.ece.cmu.edu/ the Robotics Institute http://www.ri.cmu.edu/ part of the School of Computer Science http://www.cs.cmu.edu/ and the Institute for Complex Engineered Systems (ICES) http://www.ices.cmu.edu at Carnegie Mellon University http://www.cmu.edu/
Information about microsystem technology work in general, and Micro Electro Discharge Machining in particular.
This server contains information about the objectives of the DARPA/ETO MEMS program, the DARPA's vision statement for MEMS, details of the MEMS BAA and will soon contain summaries of DARPA funded MEMS research in various organizations.
Produces MSC/PATRAN http://www.mscsoftware.com/products/products.cfm?S=74&P=4&M=0 which includes a pre- and postprocessor with analysis modeling, analysis data integration, analysis simulation, and results evaluation capabilities.
produces the MATLAB package, which may be used for general system simulation and visualization applications.
This page centralizes information about the FAB's and research going on at the MTL at MIT, including research on MEMS at MIT and elsewhere. There is also a page announcing the next http://www-mtl.mit.edu/BAMS/seminar.html
This is a Nanotechnology blog dedicated to the continuing evolution and development of nanocrystals in chemistry, engineering, physics and biology. The blog is intended to be collegial in nature and a meeting point for those in academia and in industry to interact, discuss topics and applications, build collaborations and partnerships.
The Stanford CDR maintains information on a wide variety of research projects that include collaborative design, national studies on engineering education, and computational agent infrastructures for distributed collaborative engineering. There is also a DesignNet directory of design research services.
Patent abstracts may be located and viewed online through the U.S Patent and Trademark Office http://www.uspto.gov

Instructions for ordering full copies of patents are available at http://www.uspto.gov/web/offices/ac/ido/opr/ptcs/

Bulk and Microstructures, by P.K. Basu
Offers a wide range of thin film foundry services such as coatings by sputtering and evaporation, dry etching using ion milling and RIE, wet etching and substrate dicing.
Designs and manufactures MEMS Supercritical CO2 Dryers solving post-wet-etch stiction problems. We offer a complete line of Supercritical CO2 dryers for processing MEMS devices on dies on up to 6"wafers.
Translume offers micromachining of fused silica and other materials using proprietary ultrafast laser and etching processes. Translume can provide optical and opto-mechanical design assistance, prototype development, and electro-mechanical integration.
Trikon Technologies provides plasma etch, PVD and CVD processing equipment for semiconductor wafers. Trikon's Omega DSi combines industry leading deep Si etch capability with high tool reliability for production.
In the 13 years since its founding, Trion has become a global leader in precision plasma etch and deposition technology. Trion offers innovative equipment customized for either lab or production applications. Our systems have been used for the processing of many materials from semiconductor devices to wafers up to 300mm in diameter. Trion's success has come from its investment in new processes, technical support, and customer service.
Custom MEMS contract manufacturer offering foundry services and turn-key product development, manufacturing, assembly, packaging and testing. Production of custom products: smart sensors, BioMEMS and Microfluidics, Optical MEMS and RF MEMS. Leadership for MEMS manufacturing with thick SOI DRIE bulk micromachining, and specific expertise in wafer stacking (eutectic, thermo-compression, anodic, SDB fusion bonding), and vacuum / wafer level packaging. Tronics offers product platforms for custom capacitive accelerometers and gyros, and ultra-miniature capacitive pressure sensors.
Provides technical guidance during the design and test process of a microsystem with regard to testability, test-pattern generation and fault simulation, testing and debugging.
Produces SOI wafers from 100-200 mm in diameter, with device thicknesses from 2 microns and up, made by fusion bonding.
Umech Technologies (Watertown, MA) is the leading provider of advanced instrumentation for 3-D MEMS motion analysis and dynamic surface metrology. Umech pioneered the first advanced MEMS motion analyzers (MMA) and possesses extensive application understanding on a wide range of MEMS devices.
One of the world's leading providers of wafer-level packaging, Unitive is dedicated to making semiconductors smaller, faster and lighter. With manufacturing facilities in Research Triangle Park, NC, and Hsinchu, Taiwan, Unitive partners with customers to meet their specific needs through innovative deployment of technologies, designed to speed time-to-market and lower costs. Unitive services include multi-level passivation and thin film wiring, solder bumping and chip scale packaging. Unitive is a subsidiary of Amkor Technology, Inc. one of the world's largest providers of contract semiconductor assembly and test services.
Has two research groups, led by Prof. Noel MacDonald http://www.engr.ucsb.edu/~memsucsb/ and Kim Turner http://www.engr.ucsb.edu/~tmems/
Microtechnology and Manufacturing lab
With our fabrication knowledge, experience and C-MOS capability we can offer a wide range of services (development, training, lithography, deposition, doping, bonding, dicing, metrology, etc.). Our staff is highly disciplined and dedicated to the quality and quick turn around time of your product.
The Microelectronics Center at Southampton University has been in existence now for about 20 years. Sensors research has always been a key point of our activity and in the last 15 years micromachined "MEMS" devices have formed an important research area. We have made a variety of micromachined devices in collaboration with other University researchers and Industry.
One major current thrust is to develop various acoustic MEMS using piezoelectric films or substrates.
Silicon, Pyrex, Quartz, SOI, III-V, Sapphire and more.
Virginia Semiconductor, Inc. (VSI) is a leading manufacturer of prime silicon substrates. Production quantities of 1”-150mm diameter silicon, and small quantities of custom-silicon substrates are manufactured at VSI. SOI substrates are the fastest growing VSI product; VSI offers 100mm, 150mm, 25.4mm, 50.8mm, and 76.2mm diameter SOI manufactured by silicon wafer bonding. As always, VSI can actually make any silicon wafer to any specification and continues to supply small, complicated orders to valued customers. Many VSI customers require double-side-polished silicon wafers. Crystal growth, grinding, slicing, lapping, polishing, oxidation, and SOI are all in-house manufacturing activities being achieved at our Fredericksburg, Virginia facility.
Market due diligence, design analysis and foundry relations advisor.
VTI Technologies is a world leader in the design and manufacture of motion and pressure sensors. Our extensive experience in demanding applications for the automotive industry and high-volume production places strict quality demands also on sensors we produce for other industries.

Unlimited scope of applications Sensors designed and manufactured by VTI Technologies measure acceleration, motion, shock, vibration, inclination and pressure. The application areas of our solutions range from the automotive industry and other moving machinery to a wide range of terminal devices, medical equipment manufacture and the sports and leisure industries.

The Washington Technology Center (WTC) hosts the Pacific Northwest's largest public micro fabrication laboratory. The lab is a critical research and development facility for primary-stage product development and product manufacturing. Some of the technology developed in our lab includes fiber optic medical imaging and micro miniature retinal scanning displays.
weber Sensors Inc. is a manufacturer of flow meters and flow switches for air or liquid medium. The "flow-captors" and "vent-captors" are solid state with no moving parts, can measure very low flow rates as well as high ones, and can monitor temperature as well as flow.
From memsnet.org.
Produces the CleWin layout editor.
William Andrew Publishing provides applied science references, handbooks, and databases in several subject areas of interest to the MEMS and Nanotechnology audience, including the latest release (MEMS: A Practical Guide to Design, Analysis, and Applications.)
MEMS Related Web Sites (over 100), Journals, Books, Clubs, Companies, and Consulting Help. This web page provides resources in MEMS, MST, Micromechanics, Micro Machines, Nano Devices, and small Micro Electro Mechanical Systems.
Williams offers packaging materials for hermetic packages used for MEMS. We are a manufacturer of a wide variety of lead-free solder preforms, metal ribbons and bonding wire. We also offer hermetic lids with pre-attached solder preforms, including our metal Como-Lids and optical window Visi-Lids.
Wise Tool offers illustrated reference and technical e-books, such as the tool die design hand book of high speed precision metal stamping, a step by step guide to high speed stamping tool design, and others.
XACTIX is the leading supplier of xenon difluoride silicon etch equipment and etching services, providing an ideal solution for releasing MEMS and MOEMS devices. The XACTIX etch is an isotropic, highly selective, dry, gas phase etch, providing substantial benefits over wet or plasma etch processes.
XLT has over 50,000 line items of surplus equipment and spare parts in stock. We serve the semiconductor, nanotechnology, and microelectronics industries with new, used, and refurbished processing equipment.
Worldwide leading manufacturer of high volume laser micromachining equipment for semiconductor applications. Current applications include dicing and scribing of silicon, drilling of vias at high speed, and machining of unique structures in semiconductor materials.
Yole Developpement is a market research and strategy consulting company, specializing in: - MEMS & Nanotechnologies, - Compound semiconductors & optoelectronics, - Equipment and materials for the production of semiconductor devices, - Life sciences instrumentation. Yole Developpement offers various kinds of services: - Custom market research and technology/strategy analysis. - Marketing and communication services through MicroNews (free monthly magazine). - Market reports. Founded in 1998, Yole Developpement is now the world leader in the analysis of the microtechnologies and compound semiconductors markets. Each day, Yole Developpement's team of 18 consultants is in contact with worldwide key industrial companies, R&D institutes and investors in order to help them to understand the markets and technology trends. In its analysis, Yole Developpement takes into account the complete value chain including materials and equipment suppliers, device & system manufacturers and device users. Each month, Yole Developpement edits a free monthly magazine dealing with the noteworthy news of its core competence domains: MEMS, Nano, Compounds Semiconductor, Optics & Instrumentation for Life Sciences. Feel free to register. Contact information: David Jourdan, Sales Administration & Communication Manager, jourdan@yole.fr or +33 472 830 190
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